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Youibot
Youibot ATS20
SKU: YOUIBOT-ATS20
Semiconductor fab transport robot for automated lot box transfer in cleanroom environments. Designed with precision positioning and contamination control to meet SEMI standards. Enables fully automated wafer and lot transport between process tools.
Pricing● Available in Canada
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All prices in CAD. Volume discounts available for business orders.
Key Features
Environment: Cleanroom compatible
Positioning: Precision system
Function: Automated lot box transfer
Control: Contamination prevention
Standard: SEMI compliant
Navigation: Autonomous SLAM
Integration: Fab MES systems
Technical Specifications
| Environment | Cleanroom compatible |
| Positioning | Precision system |
| Function | Automated lot box transfer |
| Control | Contamination prevention |
| Standard | SEMI compliant |
| Navigation | Autonomous SLAM |
| Integration | Fab MES systems |
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